By Kash L. Mittal
This publication chronicles the lawsuits of the 1st overseas Symposium on Adhesion facets of skinny movies held less than the auspices of MST meetings in Newark, New Jersey, October 28-29, 1999.
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Extra info for Adhesion Aspects of Thin Films
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On the other hand, in the case of RF sputtering processes the deposition parameters (cathode voltage, gas pressure and radio frequency power) are not independent of each other. Accordingly, a knowledge of the exact values of J and E in equation (3) is quite complicated. Nevertheless, an estimation of the dependence of P on the measurable parameters can be done. The energetic particles flux J can be estimated by considering the maximum flux Jm,, which, assuming the electron density to be zero within the cathode and the particles in the sheath to be ions, is given by the Child law : Y= + where V is the voltage across the sheath, I is the sheath width, 60 the vacuum dielectric constant, e the charge of electron and M ithe ion mass (Fig.