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Download Adhesion Aspects of Thin Films by Kash L. Mittal PDF

By Kash L. Mittal

This publication chronicles the lawsuits of the 1st overseas Symposium on Adhesion facets of skinny movies held less than the auspices of MST meetings in Newark, New Jersey, October 28-29, 1999.

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M. Rossnagel and H. R. Kaufman (Eds). p. 373. Noyes Publications. Peak Ridge, New Jersey (1989). 29. F. Sarto, M. Alvisi and S. Scaglione, Proc. SPIE 3836, 35 (1999). 30. D. W. Hoffmann and J. A. Thornton, J. Vac. Sci. Technol. 20, 355 (1982). 31. H. Windischmann, J. Vac. Sci. Technol. A 9, 2431 (1991). 32. P. B. Mirkarimi, K. F. McCarty and D. L. Medlin, Mater: Sci. Eng. R21,47 (1997). 33. P. Sigmund, Phys. Rev. 184, 383 (1969). 34. H. R. Kaufman, J. Vac. Sci. Technol. 15, 272 (1978). 35. J. Bottiger, J.

Misra and M. Nastasi, Appl. Phys. Lett. 75, 3123 (1999). A. Misra and M. Nastasi, J. Vac. Sci. Tecknol. A 18, 2517 (2000). B. M. Clemens, H. Kung and S. A. Barnett, MRS Bulletin 24, 20 (February 1999). J. D. Embury and J. P. Hirth, Acta Metall. 42, 2051 (1994). W. D. Nix, Scripta Mater. 39, 545 (1998). C. V. Thompson, J. Muter. Res. 8, 237 (1993). X. W. Zhou, R. A. Johnson and H. N. G. Wadley, Acta Mater. 45,4441 (1997). C. M. Gilmore and J. A. Sprague, NanoStructured Mater. 9, 643 (1997). M. Nastasi, J.

On the other hand, in the case of RF sputtering processes the deposition parameters (cathode voltage, gas pressure and radio frequency power) are not independent of each other. Accordingly, a knowledge of the exact values of J and E in equation (3) is quite complicated. Nevertheless, an estimation of the dependence of P on the measurable parameters can be done. The energetic particles flux J can be estimated by considering the maximum flux Jm,, which, assuming the electron density to be zero within the cathode and the particles in the sheath to be ions, is given by the Child law [34]: Y= + where V is the voltage across the sheath, I is the sheath width, 60 the vacuum dielectric constant, e the charge of electron and M ithe ion mass (Fig.

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